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Ion Mass Spectrometer Product List and Ranking from 5 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Jul 15, 2026～Aug 11, 2026
This ranking is based on the number of page views on our site.

Ion Mass Spectrometer Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Jul 15, 2026～Aug 11, 2026
This ranking is based on the number of page views on our site.

  1. 一般財団法人材料科学技術振興財団　MST Tokyo//Testing, Analysis and Measurement
  2. アイテス Shiga//Electronic Components and Semiconductors
  3. イオンテクノセンター Osaka//Testing, Analysis and Measurement
  4. 4 東芝ナノアナリシス Kanagawa//Testing, Analysis and Measurement
  5. 4 トヤマ Kanagawa//Testing, Analysis and Measurement
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Ion Mass Spectrometer Product ranking

Last Updated： Aggregation Period:Jul 15, 2026～Aug 11, 2026
This ranking is based on the number of page views on our site.

  1. [Case Study] Quality Control through Surface Analysis 一般財団法人材料科学技術振興財団　MST
  2. [Analysis Case] Investigation of Watermark Causes 一般財団法人材料科学技術振興財団　MST
  3. [Analysis Case] Evaluation of "Water" in Quartz and Glass Using SIMS 一般財団法人材料科学技術振興財団　MST
  4. 4 Dynamic SIMS アイテス
  5. 5 About MSDM 一般財団法人材料科学技術振興財団　MST

Ion Mass Spectrometer Product List

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Quantification of Si(1-x)Gex samples with compositional gradient.

Quantification of Si(1-x)Gex samples with compositional gradient.

Analyze three or more samples with known concentration to solve the problem of two points.

SIMS (Secondary Ion Mass Spectrometry) is used to accurately quantify the concentration distribution of Ge in Si(1-x)Gex films with a compositional gradient used in devices, in the depth direction. When analyzing Si(1-x)Gex films with SIMS, there are two issues that must be resolved. The first issue is that the secondary ion intensity of Ge relative to Si changes significantly with variations in the compositional ratio, so it is necessary to determine the relative sensitivity factor for each compositional ratio. The second issue is that the sputtering rate at each analysis point changes due to variations in the compositional ratio of Si and Ge, so it is necessary to establish the relationship between the compositional ratio and the sputtering rate. To solve these two issues, samples with known concentrations were analyzed at more than three points, and the RSF and sputtering rates were determined. *For more details, please refer to the PDF document or feel free to contact us.*

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Case Studies on Depth Resolution Measurement in Compound Semiconductor Superlattice Samples

Case Studies on Depth Resolution Measurement in Compound Semiconductor Superlattice Samples

Results of depth resolution measurements using compound semiconductor superlattice samples are published!

This case study collection presents the results of depth resolution measurements conducted by Ion Tech Center Co., Ltd., which provides services such as ion implantation, film formation and analysis, and research and commercialization management. Using Q-pole SIMS (ULVAC: ADEPT-1010), we employed a compound semiconductor sample of Al0.28Ga0.72As/GaAs that was deposited by molecular beam epitaxy (MBE) in 50nm increments to obtain the results of depth resolution. [Overview of Contents] ■ Results of Depth Resolution Measurements *For more details, please refer to the catalog or feel free to contact us.*

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FIB Light Ionization Nano Mass Imaging Device "FILMER"

FIB Light Ionization Nano Mass Imaging Device "FILMER"

Equipment using laser SNMS that achieves optical spatial resolution for environmental particle analysis and more!

Toyama's "FILMER" is a flight time secondary ion mass spectrometer that meets the needs of research and development in the field of polymer materials and organic-inorganic composite materials. It achieves a high spatial resolution with a mapping surface resolution of 50 nm, while also maintaining a mass resolution (m/Δm): 5,000 @ m/z = 56. By adopting laser SNMS, it improves the signal ion generation efficiency, enabling highly sensitive analysis of organic materials. [Features] ■ Achieves high spatial resolution ■ Capable of in-situ processing and analysis ■ Adopts laser SNMS *For more details, please refer to the PDF document or feel free to contact us.

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[Analysis Case] Evaluation of Depth Distribution of Alkali Metals in SiO2 Using SIMS

[Analysis Case] Evaluation of Depth Distribution of Alkali Metals in SiO2 Using SIMS

High-precision distribution evaluation of alkali metals through sample cooling.

When measuring the distribution of alkali metals in SiO2 under general analytical conditions, it is known that changes occur in the depth profile concentration distribution due to influences such as the electric field caused by the measurement. In MST, by cooling the sample during SIMS measurements, we suppress changes in the concentration distribution of alkali metals and evaluate the concentration distribution with higher accuracy.

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[Analysis Case] Evaluation of Element Distribution in Oxide ReRAM Operating Area Using SIMS

[Analysis Case] Evaluation of Element Distribution in Oxide ReRAM Operating Area Using SIMS

High-sensitivity evaluation of local elemental distribution in oxide devices using oxygen isotopes.

In oxide ReRAM, it was suggested that oxygen diffusion associated with the application of an electric field is related to memory operation (resistance change). Since SIMS analysis allows for the measurement of isotopes, utilizing the isotope 18O ion implantation technique enables the tracking of oxygen diffusion. For devices where 18O was locally implanted, a bridge structure that serves as the operating region was formed by applying an electric field, and elemental mapping revealed that the intensity of 18O in the bridge area was weak, indicating localized reduction.

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[Analysis Case] Evaluation of Interdiffusion Between Layers of CIGS Solar Cells Using SIMS

[Analysis Case] Evaluation of Interdiffusion Between Layers of CIGS Solar Cells Using SIMS

It is possible to achieve high-precision measurements that are not affected by surface irregularities.

In solar cells, surface roughness is utilized to effectively absorb sunlight. When conducting SIMS analysis, the surface roughness leads to a decrease in depth resolution. Measurements from the surface appear to show that elements like Cd, Zn, and O are diffusing into the CIGS layer due to the effects of surface roughness and knock-on (Figure 3), but measurements taken from the substrate side (back side) reveal that there is no significant diffusion of Cd, Zn, and O into the CIGS layer (Figure 4). In addition to interdiffusion, it is also possible to evaluate changes in the composition of the main components (Cu, In, Ga, Se) and the concentration distribution of impurities (B, Na, Fe).

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[Analysis Case] Evaluation of SiON Film by SIMS

[Analysis Case] Evaluation of SiON Film by SIMS

Evaluation of nitrogen in SiON with a film thickness of approximately 1 nm is possible.

It is possible to evaluate the distribution of nitrogen in SiON films in the depth direction, even down to low concentration areas where high-sensitivity SIMS analysis excels, and to assess the amount of nitrogen (unit: atoms/cm²) with high precision (Figure 1). Additionally, nitrogen can be converted to atomic% (Figure 2), and a fitting curve for nitrogen can be calculated, allowing for the determination of nitrogen's peak concentration, depth, and half-width through fitting (Figure 3).

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[Analysis Case] Evaluation of B Penetration Amount from SSDP-SIMS Gate to Substrate

[Analysis Case] Evaluation of B Penetration Amount from SSDP-SIMS Gate to Substrate

Measurement avoiding the effects of surface irregularities and high concentration layers using SSDP-SIMS.

By conducting SIMS analysis (SSDP-SIMS) from the substrate side, it is possible to obtain measurements that are not affected by the knock-on effects from the high-concentration layer on the surface due to surface roughness and sputtering. We evaluated the amount of boron penetration from the gate electrode (B-doped Poly-Si) into the substrate. Measurements from the substrate side showed no effects from knock-on, indicating that a more accurate evaluation of the penetration amount is possible. Thus, SSDP-SIMS is effective for assessing the barrier properties of barrier metals, the incorporation of metals into Low-k films, and the evaluation just beneath the rough silicide.

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Improvement of depth resolution by vertical incidence method.

Improvement of depth resolution by vertical incidence method.

SIMS: Secondary Ion Mass Spectrometry

■Measurement Method for Depth Direction Distribution (1) Limitations of Depth Direction Resolution in Oblique Incidence Method The dependence of depth direction resolution on primary ion energy in the oblique incidence method was investigated using δ-doped samples (Figure 1). It was found that in the oblique incidence method, there is a limit to the improvement of depth direction resolution due to the roughness of the crater bottom (Figure 2). (2) Improvement of Depth Direction Resolution by Vertical Incidence Method Figure 3 shows the relationship between the half-width of the B peak (δ-doped sample) and primary ion energy in both vertical and oblique incidence methods. In the region below 1 keV of primary ion energy, where there were limitations in improving resolution with the oblique incidence method, improvements in resolution have been achieved with the vertical incidence method.

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[Analysis Case] Investigation of Watermark Causes

[Analysis Case] Investigation of Watermark Causes

Identification of contamination sources on the outermost surface using TOF-SIMS.

TOF-SIMS detects secondary ions originating from molecules and visualizes their distribution. By estimating the components derived from the ion species detected from abnormal areas, it is possible to investigate which process the anomaly occurred in. When abnormal areas (such as discoloration or adhesion) are found on wafers or products, conducting TOF-SIMS measurements can help distinguish whether the issue is due to watermarks from cleaning and drying, alterations in the base material, or contaminants from a different process, making it effective for identifying the causes of defects.

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[Analysis Case] Evaluation of "Water" in Si Oxide Films and ITO Films using SIMS

[Analysis Case] Evaluation of "Water" in Si Oxide Films and ITO Films using SIMS

Depth-direction analysis of hydrogen using 'heavy water (D2O) treatment'

We will introduce a case where the permeability of water (H2O) in a thin film with a thickness of less than 1 µm was evaluated by measuring the distribution of deuterium (D) in the film. When hydrogen (H) is originally present in the thin film, it is difficult to distinguish whether the hydrogen is due to the influence of water. Therefore, treatment with heavy water (D2O) was performed, and the distribution of the naturally occurring isotope deuterium was measured in the depth direction using SIMS. By examining the depth distribution of deuterium, it is possible to estimate how deep the water has penetrated.

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[Analysis Case] Evaluation of Dopant Concentration Distribution in a-Si Thin Film Solar Cells Using SIMS

[Analysis Case] Evaluation of Dopant Concentration Distribution in a-Si Thin Film Solar Cells Using SIMS

Select measurement conditions according to the target element.

We will introduce a case where the concentration distribution of dopants in a-Si (amorphous silicon) was quantitatively evaluated in flexible thin-film Si solar cells. The sample, sealed with resin, was disassembled, and SIMS analysis was conducted. In the analysis of B (Figure 3), measurements were performed with enhanced depth resolution because it exists in shallow areas on the surface side. In the analysis of P (Figure 4), a large amount of H exists in a-Si, causing mass interference; therefore, measurements were conducted under conditions that separated H from Si using high mass resolution methods to detect only P.

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[Analysis Case] SIMS Measurement of Specially Shaped Samples

[Analysis Case] SIMS Measurement of Specially Shaped Samples

Analysis is possible even for special shapes through innovative fixing methods.

Typically, SIMS measurements are conducted using chips with a flat surface of a few millimeters in size, but analysis can also be performed on small chips or samples with special shapes, typically less than 1 mm in size, by applying a fixed pre-treatment. Some samples that require investigation of trace components may have shapes that are not suitable for analysis under normal conditions, such as tiny chips or wire-like samples (Figure 1). In such cases, analysis is performed after fixation (Figure 2). Additionally, analysis may be possible for cross-sections, side surfaces, or samples with special shapes by applying pre-treatment.

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[Analysis Case] Depth Profile Concentration Analysis of Impurities in GaN-based LEDs Using SIMS

[Analysis Case] Depth Profile Concentration Analysis of Impurities in GaN-based LEDs Using SIMS

Measurements will be taken under analysis conditions suited to the purpose.

We will introduce a case where the depth concentration distribution of dopant elements such as Mg and Si in GaN-based LED structures was evaluated using multiple analysis modes. By selecting the optimal analysis mode according to the purpose in SIMS analysis, more precise evaluations can be achieved, so please feel free to consult with us.

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[Analysis Case] Composition Analysis of Compound Semiconductors by SIMS

[Analysis Case] Composition Analysis of Compound Semiconductors by SIMS

Capable of evaluating the composition of the main elemental components of compound semiconductors in the depth direction.

Generally, in SIMS, the quantification of major elements with concentrations exceeding a certain percentage is considered to be low. However, by using the M Cs+ (M: target element) detection mode with Cs+ as the primary ion, it is possible to determine the compositional distribution of major elements in the depth direction. An example of depth compositional evaluation for Al and Ga in AlGaAs is presented.

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[Analysis Case] Evaluation of Distribution State and Component Analysis of Fluorine-based Films

[Analysis Case] Evaluation of Distribution State and Component Analysis of Fluorine-based Films

Evaluation of distribution uniformity and identification/estimation of organic matter through surface analysis of microdomains.

The state of the water-repellent surface in water-repellent treatment differs based on whether fluorine-based compounds are distributed in an island-like manner or uniformly. Therefore, we conducted observations of the distribution of fluorine-based compounds using TOF-SIMS. As a result, it was found that they are distributed unevenly. Additionally, by performing qualitative analysis in a 1μm square area, it was determined that the fluorine-based film is Krytox. Measurement method: TOF-SIMS Product field: Electronic components and daily necessities Analysis purpose: Composition evaluation, identification, composition distribution evaluation For more details, please download the materials or contact us.

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About MSDM

About MSDM

TOF-SIMS: Time-of-Flight Secondary Ion Mass Spectrometry

In depth profiling analysis using TOF-SIMS, if the positional information on the plane (x, y) is ignored, mass spectra exist at each depth (z), resulting in three-dimensional data of depth, mass, and spectral intensity. The visualization of this three-dimensional data as a single image is called MSDM (Mass Spectra Depth Mapping) representation.

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[Analysis Case] Ultra-high Sensitivity Measurement of Impurities in SiC Using SIMS

[Analysis Case] Ultra-high Sensitivity Measurement of Impurities in SiC Using SIMS

Evaluates bulk concentrations at the ppb to ppt level.

In the development of ultra-high voltage, low-loss SiC power devices that can be used in substations, controlling low carrier concentration is necessary, and SIMS analysis is effective for evaluating extremely low concentrations of impurities. In SIMS analysis, it is possible to evaluate extremely low concentrations by limiting the impurities to one element without simultaneously acquiring multiple elements. This document presents analysis examples that evaluate the extremely low concentration range of impurities in SiC with ultra-high sensitivity, which has been difficult to assess conventionally.

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[Analysis Case] TOF-SIMS Analysis of Solder Separation Cross Section

[Analysis Case] TOF-SIMS Analysis of Solder Separation Cross Section

It is possible to evaluate the distribution of inorganic and organic substances in microdomains.

To investigate the causes of solder delamination, it is effective to conduct component analysis of the solder and the substrate interface. TOF-SIMS is a suitable method for evaluating delaminated areas because it can simultaneously analyze elemental composition and molecular information of organic and inorganic substances, as well as perform imaging analysis. This document presents a case study analyzing the cross-section of a delaminated solder area, confirming the distribution of substrate components, resin components, and organic components other than resin.

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Regarding interface and depth direction resolution

Regarding interface and depth direction resolution

SIMS: Secondary Ion Mass Spectrometry

The SIMS analysis profile of the interface between different materials changes with a certain width in the depth direction. This is due to the characteristics of SIMS analysis, which are influenced by ion beam mixing and the roughness of the sputtered surface. The detected impurities represent averaged information up to the mixed depth, detecting ions from regions with a width in the depth direction. Therefore, the interface position is generally defined as the location where the ion intensity of the main constituent elements reaches 50%.

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[Analysis Case] Analysis of the HTM Layer in Perovskite Solar Cells

[Analysis Case] Analysis of the HTM Layer in Perovskite Solar Cells

Evaluation of component and depth direction distribution is possible.

Perovskite solar cells have excellent conversion efficiency in a film form and can be manufactured at low cost, leading to active research and development towards practical application. TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) is effective for component analysis of the HTM layer (hole transport layer), evaluation of main components, dopants, and the depth distribution of impurities. This document presents a case study of depth analysis from the HTM layer to the perovskite layer. Measurement method: TOF-SIMS Product field: Solar cells Analysis purpose: Identification, distribution evaluation For more details, please download the document or contact us.

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[Analysis Case] Imaging of the Cuticle

[Analysis Case] Imaging of the Cuticle

It is possible to evaluate the distribution of components in the hair cuticle!

Our organization offers imaging of cuticles. The evaluation of cuticles has been limited to structural observation using electron microscopy due to their fine structure, and detailed component distribution has remained unclear. By using TOF-SIMS, which can evaluate the distribution of inorganic and organic materials at the sub-micron level, it is possible to assess the distribution of various components within the cuticle. This document presents the results of evaluating hair and visualizing the component distribution within the cuticle. [Measurement and Processing Method] ■ [TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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[Presentation] Surface analysis applicable in various fields! TOF-SIMS Analysis Case Studies

[Presentation] Surface analysis applicable in various fields! TOF-SIMS Analysis Case Studies

From inorganic to organic materials, leave high-sensitivity surface analysis to us!

TOF-SIMS analysis allows for detailed examination of the sample's outermost surface, as well as the ability to obtain information in the depth direction, making it possible to understand the distribution of components within the material. Additionally, imaging can visualize the spatial distribution of components. This document includes case studies of products analyzed from various fields. Please feel free to contact us!

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[Analysis Case] Diamond Evaluation Case Using SIMS

[Analysis Case] Diamond Evaluation Case Using SIMS

It is possible to quantitatively evaluate impurity elements and assess film thickness.

Diamonds possess excellent physical properties such as high breakdown electric fields, making them promising materials for next-generation power devices and quantum devices. By doping diamonds with impurity elements, they can function as high-performance semiconductors. To understand the concentration distribution of the doped elements, SIMS analysis, which can detect impurities in the ppb to ppm range with high sensitivity, is effective. Additionally, it is possible to evaluate the film thickness of each layer from the impurity concentration distribution. MST offers a variety of diamond standard samples and can quantify over 30 different elements.

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High-performance automated SIMS

High-performance automated SIMS

It is possible to provide rapid feedback for process development and defect analysis of semiconductor devices!

Secondary Ion Mass Spectrometry (SIMS) enables depth profiling analysis with high sensitivity and high mass resolution for all elements. Furthermore, our company has added automation features from sample introduction to analysis, allowing for high-precision automated measurements. As a result, we can provide rapid feedback for process development and defect analysis in semiconductor devices, where quick responses are required. 【Features】 ■ High sensitivity measurement: Capable of high sensitivity measurement of heavy elements such as Ag, In, and Sb. ■ High mass resolution measurement ・M/ΔM = ~10,000 ・Evaluation of contamination levels of P, Al, Fe, Ni, etc., in Si and SiO2. *For more details, please download the PDF or feel free to contact us.

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Secondary Ion Mass Spectrometry (SIMS)

Secondary Ion Mass Spectrometry (SIMS)

There are various types of mass spectrometers, such as magnetic field type, quadrupole type, and time-of-flight type, which are used according to the purpose of the analysis!

Secondary Ion Mass Spectrometry (SIMS) is a highly sensitive analytical technique capable of identifying and quantifying trace impurity elements at the ppb level. Since measurements are conducted while sputtering, it is possible to obtain the depth distribution of impurities within the film. Please feel free to contact us when you need assistance. 【Features】 ■ Magnetic Field SIMS: Used for evaluating impurities that require high sensitivity. ■ Quadrupole SIMS: Used for evaluations that require depth resolution and for assessing multilayer films that include insulating films. ■ Time-of-Flight SIMS: Used for evaluating the molecular structure level of trace substances on the surface, as well as for assessing the contamination state of organic materials and minute foreign substances on the surface. *For more details, please download the PDF or feel free to contact us.

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High-performance magnetic field SIMS

High-performance magnetic field SIMS

SIMS equipped with three features: high sensitivity, high mass resolution, and high depth resolution!

The "high-performance magnetic field SIMS" is a device that can analyze all elements with high sensitivity in depth direction. With high-performance SIMS capable of high-sensitivity and high mass resolution analysis even in low-energy analysis, it has become possible to achieve high-precision measurements in challenging, extremely shallow regions. As a result, it can now be applied to semiconductor devices, which are advancing in miniaturization and diversification of materials. 【Features】 ■ High sensitivity measurement (high transmission rate) ■ High mass resolution ■ Various measurements possible from ultra-low energy analysis to standard analysis ■ Equipped with a high-brightness ion gun ■ Automatic measurement with high repeatability precision, capable of measuring up to 25 samples *For more details, please download the PDF or feel free to contact us.

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Dynamic SIMS

Dynamic SIMS

Suitable for analysis of glass, metal, ceramics, silicon, compound semiconductors, shallow implants, and more!

"DYNAMIC SIMS" is a secondary ion mass spectrometry method that can detect trace amounts of all elements (from H to U) in samples with high sensitivity, ranging from ppm to ppb. It allows for qualitative analysis and depth profiling, and additionally enables high-precision quantitative analysis using standard samples (conducted at our partner company's facility). The minimum beam diameter is approximately 30 µm, and it can be further reduced depending on the material. 【Features】 ■ Automatic loading/unloading of samples, high throughput (24 samples/load) ■ Unmatched depth profiling capability and high depth resolution, wide dynamic range ■ Optimized for the analysis of glass, metals, ceramics, silicon, compound semiconductors, shallow implants, etc. ■ Highest detection limit: from ppm to ppb (10^-6 to 10^-9) *For more details, please refer to the PDF document or feel free to contact us.

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SIMS (Secondary Ion Mass Spectrometry)

SIMS (Secondary Ion Mass Spectrometry)

This is a method for qualitative and quantitative analysis of components contained in a sample by detecting secondary ions and measuring the detection amount at each mass.

When ions are incident on the sample surface, various particles such as electrons, neutral particles, and ions are emitted from the sample surface. SIMS is a technique that detects these ions and measures the detection quantity at each mass to perform qualitative and quantitative analysis of the components contained in the sample. - High sensitivity (ppb to ppm) - Analysis of all elements from H to U is possible - Wide detection concentration range (from major component elements to trace impurities) - Quantitative analysis using standard samples is possible - Depth direction analysis is possible - Evaluation with depth direction resolution of a few to several tens of nm is possible - Measurement of micro-regions up to a few micrometers in size is possible - Isotope analysis is possible - Destructive analysis

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[TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry

[TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry

This is a method for structural analysis of the sample surface. Due to its sensitivity to the surface compared to other analytical devices, it is suitable for identifying organic contaminants on the very surface.

This is a method for structural analysis of sample surfaces. It is suitable for identifying organic contamination on the very surface due to its sensitivity compared to other analytical devices. Using a sputter ion source, it is possible to analyze the distribution of inorganic and organic materials in the depth direction. - Structural analysis and identification of organic and inorganic compounds are possible. - Coordination data from foreign substance inspection devices can be linked. - Qualitative analysis is possible from micron-order microforeign substances to several centimeters. - It is possible to analyze the very surface with high sensitivity. - Image analysis is possible. - Qualitative analysis of depth direction analysis is possible.

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  • Ion Mass Spectrometer

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